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1.

図書
図書
1. Proceedings, IEEE the Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and systems : Heidelberg, Germany, January 25-29, 1998 (: soft ; : case ; : micro)
sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Ministry of Economic Affairs of Baden-Württemberg
出版情報: Piscataway, N.J. : IEEE Service Center, c1998  xxx, 666 p. ; 30 cm
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2.

図書
図書
2. Proceedings, IEEE the Tenth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and robots : Nagoya, Japan, January 26-30, 1997 (: soft ; : case ; : micro)
sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center
出版情報: Piscataway, N.J. : IEEE Service Center, c1997  xxiv, 545 p. ; 30 cm
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3.

図書
図書
3. Proceedings, the Ninth Annual International Workshop on IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : San Diego, California, USA, February 11-15, 1996 (: soft ; : case ; : micro)
sponsored by the IEEE Robotics and Automation Society
出版情報: Piscataway, N.J. : IEEE Service Center, c1996  xxiv, 528 p. ; 28 cm
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4.

図書
図書
4. Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : Amsterdam, Netherlands, January 29, February 2, 1995 (: soft. ; : case. ; : micro.)
sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division
出版情報: Piscataway : IEEE Service Center, c1995  418 p. ; 30 cm
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5.

図書
図書
5. Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : Travemünde, Germany, 4 February - 7 February 1992 (: soft. ; : case. ; : micro.)
sponsored by the IEEE Robotics and Automation Society, and in cooperation with the German IEEE Section ; W. Benecke, H.-C. Petzold (eds.)
出版情報: [New York, NY] : IEEE, 1992  xv, 240 p. ; 30 cm
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6.

図書
図書
6. Proceedings, IEEE micro electro mechanical systems : an investigation of micro structures,sensors, actuators, machines, and robots : Nara, Japan, 30 January-2 February 1991
sponsored by the IEEE Robotics and Automation Society, and incooperation with the IEE of Japan and the ASME Dynamic Systems and Control Division
出版情報: New York, NY : IEEE, c1991  xiv, 288 p. ; 30 cm
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7.

図書
図書
7. Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : Oiso, Japan, January 25-28, 1994 (: soft. ; : case. ; : micro.)
sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center
出版情報: Piscataway : IEEE Service Center, c1994  xiv, 360 p. ; 28 cm
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8.

図書
図書
8. Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : Fort Lauderdale, Florida, February 7-10, 1993 (: soft. ; : case. ; : micro.)
sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division
出版情報: Piscataway : IEEE Service Center, c1993  xvii, 294 p. ; 28 cm
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