Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A. / editors, Shyam P. Murarka ... [et al.]
- 資料種別:
- 図書
- 出版情報:
- Warrendale, Pa. : Materials Research Society, c1998
- 形態:
- xvi, 560p. ; 24 cm
- シリーズ名:
- Materials Research Society symposium proceedings ; 514 <BA00013775>
- 著者名:
- ISBN:
- 9781558994201 [1558994203]
- 書誌ID:
- BA38805539
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