Proceedings of the Symposium on Interconnect and Contact Metallization | 東京工業大学附属図書館蔵書検索

>> Google Books

所蔵情報QRコード

Proceedings of the Symposium on Interconnect and Contact Metallization / editor, Hazara S. Rathore ... [et al.]

資料種別:

図書

出版情報:

Pennington, NJ : Electrochemical Society, c1998

形態:

viii, 276 p. ; 23 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 97-31 <BA01323290>

著者名:

ISBN:

9781566771849 [1566771846]

書誌ID:

BA4316326X

子書誌情報

フルテキスト

Loading contents information

所蔵情報

Loading availability information

他の版・巻

書誌詳細

その他の標題:	Interconnect and contact metallization
注記:	"Dielectric Science and Technology, Electronics, and Electrodeposition divisions." Includes bibliographical references and index
主題:	Dielectrics--Congresses; Electrochemical metallizing--Congresses; Integrated circuits--Ultra large scale integration--Design and construction--Congresses; Integrated circuits--Ultra large scale integration--Materials--Congresses; Plasma-enhanced chemical vapor deposition--Congresses
言語:	英語

東工大ブックレビュー

Loading review information

類似資料:

1 図書 Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues International Symposium on Low and High Dielectric Constant Materials: Materials Science, Processing, and Reliability … Electrochemical Society	7 図書 Copper interconnects, new contact metallurgies, structures, and low-k interlevel dielectrics : proceedings of the internatioal symposium International Symposium on Copper Interconnects, New Contact Metallurgies/Structures, and Low-k Interlevel Dielectrics, … Electrochemical Society
2 図書 Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium International Symposium on Low and High Dielectric Constant Materials, Lododa, Mark, J., Singh, R., Ang, Simon S., … Electrochemical Society	8 図書 Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium ([I] ; II) Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics. International Symposium, … Electrochemical Society
3 図書 Physicas and technology of high-k gate dielectrics : proceedings of the International Symposium on High Dielectric Constant Materials : Materials Science, … ([I] ; II) International Symposium on High Dielectric Constant Materials: Materials Science, Processing, and Reliability, and … Electrochemical Society	9 図書 Interconnect and contact metallization for ULSI : proceedings of the international symposium Mathad, G. S., Arita, Y., Electrochemical Society. Dielectric Science and Technology Division Electrochemical Society
4 図書 Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues, proceedings of the fourth International Symposium and Thin … International Symposium on Low and High Dielectric Constant Materials, International Symposium on Thin Film Materials … Electrochemical Society	10 図書 Proceedings of the Symposia on Interconnects, Contact Metallization, and Multilevel Metallization and Reliability for Semiconductor Devices, Interconnects, amd … Symposium on Interconnects, Contact Metallization, and Multilevel Metallization, Symposium on Reliability for … Electrochemical Society
5 図書 Proceedings of the Symposium on Ion Implantation and Dielectrics for Elemental and Compound Semiconductors Symposium on Ion Implantation and Dielectrics for Elemental and Compound Semiconductors, Pearton, S. J., Jones, K. S., … Electrochemical Society	11 図書 Proceedings of the Symposium on Reliability of Metals in Electronics (: pbk) Symposium on Reliability of Metals in Electronics, Rathore, Hazara S., Electrochemical Society. Dielectric Science and … Electrochemical Society
6 図書 Proceedings of the symposia on reliability of semiconductor devices and interconnection and multilevel metallization, interconnection, and contact technologies Rathore, Harzara S., Schwartz, G. C., Susko, R. A. (Robin A.), Electrochemical Society. Dielectrics and Insulation … Electrochemical Society	12 図書 Group IV semiconductor nanostructures--2006 : symposium held November 27-December 1, 2006, Boston, Massachusetts, U.S.A. Tsybeskov, Leonid, Group IV Semiconductor Nanostructures Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12