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Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films / edited by Vik J. Kapoor, Kevin T. Hankins ; [sponsored by the] Dielectrics and Insulation and Electronics Divisions

資料種別:

図書

出版情報:

Pennington, NJ (10 S. Main St., Pennington 08534-2696 : Electrochemical Society), c1987

形態:

x, 550 p. ; 23 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 87-10 <BA01323290>

著者名:

書誌ID:

BA1260435X

子書誌情報

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書誌詳細

その他の標題:	Silicon nitride and silicon dioxide thin insulating films
注記:	Spine title: Silicon nitride and silicon dioxide thin insulating films Includes bibliographies and indexes
主題:	Electric and insulation--Thin films--Congresses; Silicon dioxide--Congresses; Silicon nitride--Congresses; Thin film devices--Congresses
言語:	英語

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