Metallization : performance and reliability issues for VLSI and ULSI : 12-13 September 1991, San Jose, California | 東京工業大学附属図書館蔵書検索

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Metallization : performance and reliability issues for VLSI and ULSI : 12-13 September 1991, San Jose, California / Gennady S. Gildenblat, Gary P. Schwartz, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c1991

形態:

vii, 159 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1596 <BA0022700X>

著者名:

ISBN:

9780819407276 [0819407275]

書誌ID:

BA26308005

子書誌情報

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書誌詳細

注記:	"Part of a two-conference program on Rapid Thermal Processing and Metallization held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991, in San Jose, California"--P. v Includes bibliographical references and index
主題:	Integrated circuits--Very large scale integration--Reliability--Congresses; Integrated circuits--Very large scale integration--Testing--Congresses; Metallic films--Congresses; Vapor-plating--Congresses
言語:	英語

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