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1.

図書
図書
1. Optical characterization techniques for high-performance microelectronic device manufacturing II : 25-26 October 1995, Austin, Texas
John K. Lowell, Ray T. Chen, Jagdish P. Mathur, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c1995  ix, 302 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2638
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2.

図書
図書
2. Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas
Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
出版情報: Bellingham, Wash. : SPIE, c1996  ix, 218 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2877
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