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1.

図書
図書
1. Metallization : performance and reliability issues for VLSI and ULSI : 12-13 September 1991, San Jose, California
Gennady S. Gildenblat, Gary P. Schwartz, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c1991  vii, 159 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1596
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2.

図書
図書
2. Submicrometer metallization : the challenges, opportunities, and limitations : 23-25 September 1992, San Jose, California
Thomas Kwok, Takamaro Kikkawa, Krishna Shenai, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash. : SPIE, c1993  ix, 344 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1805
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