Education in microelectronics and MEMS : 28-29 October 1999, Royal Pines Resort, Queensland, Australia / Fred Payne, Ash M. Parameswaran, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.]
- 資料種別:
- 図書
- 出版情報:
- Bellingham, Wash., USA : SPIE, c1999
- 形態:
- v, 178 p. ; 28 cm
- シリーズ名:
- Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3894 <BA0022700X>
- 著者名:
- ISBN:
- 9780819434951 [0819434957]
- 書誌ID:
- BA86048842
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Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia
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