Microelectronic manufacturing yield, reliability, and failure analysis IV : 23-24 September, 1998, Santa Clara, California | 東京工業大学附属図書館蔵書検索

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Microelectronic manufacturing yield, reliability, and failure analysis IV : 23-24 September, 1998, Santa Clara, California / Sharad Prasad, Hans-Dieter Hartmann, Tohru Tsujide, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Solid State Technology ... [et al.]

資料種別:

図書

出版情報:

Bellingham, Washington : SPIE, c1998

形態:

vii, 240 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3510 <BA0022700X>

著者名:

ISBN:

9780819429698 [0819429694]

書誌ID:

BC07259982

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書誌詳細

その他の標題:	Microelectronic manufacturing yield, reliability, and failure analysis 4
注記:	Includes bibliographical references and author index
主題:	Integrated circuits--Defects Congresses; Integrated circuits--Reliability Congresses; Integrated circuits--Testing Congresses; Integrated circuits--Very large scale integration Congresses; Microelectronics Congresses
言語:	英語

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