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1.

図書
図書
1. Proceedings, IEEE the Tenth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and robots : Nagoya, Japan, January 26-30, 1997 (: soft ; : case ; : micro)
sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center
出版情報: Piscataway, N.J. : IEEE Service Center, c1997  xxiv, 545 p. ; 30 cm
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2.

図書
図書
2. Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : Amsterdam, Netherlands, January 29, February 2, 1995 (: soft. ; : case. ; : micro.)
sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division
出版情報: Piscataway : IEEE Service Center, c1995  418 p. ; 30 cm
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3.

図書
図書
3. Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : Oiso, Japan, January 25-28, 1994 (: soft. ; : case. ; : micro.)
sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center
出版情報: Piscataway : IEEE Service Center, c1994  xiv, 360 p. ; 28 cm
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