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1.

図書
図書
1. The changing frontiers of optical techniques for industrial measurement and control : proceedings of the 5th International Congress on Application of Lasers and Electro-Optics, ICALEO '86, 10-13 November 1986, Arlington, Virginia, USA (: IFS ; : Springer : ger ; Springer : us)
edited by C. Murray Penney and H. John Caulfield
出版情報: Bedford : IFS Publications , Berlin : Springer, c1987  258 p. ; 30 cm
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2.

図書
図書
2. Optical techniques in electrochemistry
edited by Rolf H. Muller
出版情報: New York : Wiley, c1973  542 p. ; 24 cm
シリーズ名: Advances in electrochemistry and electrochemical engineering ; v. 9
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3.

図書
図書
3. Measurement of suspended particles by quasi-elastic light scattering
edited by Barton E. Dahneke
出版情報: New York : Wiley, c1983  xiv, 570 p. ; 24 cm
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4.

図書
図書
4. Polarized light and optical measurement. 1st ed
D. Clarke, J.F. Grainger
出版情報: Oxford ; New York : Pergamon Press, 1971  viii, 187 p. ; 23 cm
シリーズ名: International series of monographs in natural philosophy ; v. 35
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5.

図書
図書
5. Selected papers on optical shop metrology (: pbk)
Daniel Malacara, editor
出版情報: Bellingham, Wash., USA : SPIE Optical Engineering Press, c1990  xv, 702 p. ; 28 cm
シリーズ名: SPIE milestone series / Brian J. Thompson, general editor ; v. MS 18
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6.

図書
図書
6. Physical optics and light measurements
edited by Daniel Malacara
出版情報: Boston ; Tokyo : Academic Press, c1988  xiv, 341 p. ; 24 cm
シリーズ名: Methods of experimental physics ; v. 26
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7.

図書
図書
7. Optical transforms
[edited by] H. Lipson
出版情報: London ; New York : Academic Press, 1972  xi, 436 p. ; 24 cm
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8.

図書
図書
8. Optical measurement of surface topography (:hbk)
Richard Leach (Ed.)
出版情報: Berlin ; Heidelberg : Springer, c2011  xiii, 323p. ; 25cm
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目次情報: 続きを見る
Introduction to Surface Texture Measurement / Richard Leach1：
Surface Texture Measurement / 1.1：
Surface Profile and Areal Measurement / 1.2：
Areal Surface Texture Measurement / 1.3：
Surface Texture Standards and GPS / 1.4：
Profile Standards / 1.4.1：
Areal Specification Standards / 1.4.2：
Instrument Types in the ISO 25178 Series / 1.5：
The Stylus Instrument / 1.5.1：
Scanning Probe Microscopes / 1.5.2：
Scanning Electron Microscopes / 1.5.3：
Optical Instrument Types / 1.5.4：
Considerations When Choosing a Method / 1.6：
Acknowledgements
References
Some Common Terms and Definitions / 2：
Introduction / 2.1：
The Principal Aberrations / 2.2：
Objective Lenses / 2.3：
Magnification and Numerical Aperture / 2.4：
Spatial Resolution / 2.5：
Optical Spot Size / 2.6：
Field of View / 2.7：
Depth of Field and Depth of Focus / 2.8：
Interference Objectives / 2.9：
Limitations of Optical 3D Sensors / Gerd Häusler ; Svenja Ettl3：
Introduction: What Is This Chapter About? / 3.1：
The Canonical Sensor / 3.2：
Optically Rough and Smooth Surfaces / 3.3：
Type I Sensors: Triangulation / 3.4：
Type II and Type III Sensors: Interferometry / 3.5：
Type IV Sensors: Deflectometry / 3.6：
Only Four Sensor Principles? / 3.7：
Conclusion and Open Questions / 3.8：
Calibration of Optical Surface Topography Measuring Instruments / Claudiu Giusca4：
Introduction to Calibration and Traceability / 4.1：
Calibration of Surface Topography Measuring Instruments / 4.2：
Can an Optical Instrument Be Calibrated? / 4.3：
Types of Material Measure / 4.4：
Calibration of Instrument Scales / 4.5：
Noise / 4.5.1：
Residual Flatness / 4.5.2：
Amplification, Linearity and Squareness of the Scales / 4.5.3：
Resolution / 4.5.4：
Relationship between the Calibration, Adjustment and Measurement Uncertainty / 4.6：
Summary / 4.7：
Chromatic Confocal Microscopy / François Blateyron5：
Basic Theory / 5.1：
Confocal Setting / 5.1.1：
Axial Chromatic Dispersion / 5.1.2：
Spectral Decoding / 5.1.3：
Height Detection / 5.1.4：
Metrological Characteristics / 5.1.5：
Spot Size / 5.1.5.1：
Instrumentation / 5.2：
Lateral Scanning Configurations / 5.2.1：
Profile Measurement / 5.2.1.1：
Areal Measurement / 5.2.1.2：
Optoelectronic Controller / 5.2.2：
Optical Head / 5.2.3：
Light Source / 5.2.4：
Chromatic Objective / 5.2.5：
Spectrometer / 5.2.6：
Optical Fibre Cord / 5.2.7：
Instrument Use and Good Practice / 5.3：
Calibration / 5.3.1：
Calibration of Dark Level / 5.3.1.1：
Linearisation of the Response Curve / 5.3.1.2：
Calibration of the Height Amplification Coefficient / 5.3.1.3：
Calibration of the Lateral Amplification Coefficient / 5.3.1.4：
Calibration of the Hysteresis in Bi-directional Measurement / 5.3.1.5：
Preparation for Measurement / 5.3.2：
Pre-processing / 5.3.3：
Limitations of the Technique / 5.4：
Local Slopes / 5.4.1：
Scanning Speed / 5.4.2：
Light Intensity / 5.4.3：
Non-measured Points / 5.4.4：
Outliers / 5.4.5：
Interference / 5.4.6：
Ghost Foci / 5.4.7：
Extensions of the Basic Principles / 5.5：
Thickness Measurement / 5.5.1：
Line and Field Sensors / 5.5.2：
Absolute Reference / 5.5.3：
Case Studies / 5.6：
Point Autofocus Instruments / Katsuhiro Miura ; Atsuko Nose6：
Comparison with Roughness Material Measures / 6.1：
Three-Dimensional Measurement of Grinding Wheel Surface Topography / 6.3.2：
Limitations of PAI / 6.4：
Lateral Resolution / 6.4.1：
Vertical Resolution / 6.4.2：
The Maximum Acceptable Local Surface Slope / 6.4.3：
Conclusion / 6.5：
Focus Variation Instruments / Franz Helmli7：
How Does It Work? / 7.1：
Acquisition of Image Data / 7.2.2：
Measurement of 3D Information / 7.2.3：
Post-processing / 7.2.4：
Handling of Invalid Points / 7.2.5：
Difference to Other Techniques / 7.3：
Difference to Imaging Confocal Microscopy / 7.3.1：
Difference to Point Auto Focusing Techniques / 7.3.2：
Optical System / 7.4：
CCD Sensor / 7.4.2：
Microscope Objective / 7.4.3：
Driving Unit / 7.4.5：
Practical Instrument Realisation / 7.4.6：
Limitations of the Technology / 7.5：
Translucent Materials / 7.6.1：
Measurable Surfaces / 7.6.2：
Repeatability Information / 7.7：
High Radiometric Data Acquisition / 7.7.2：
2D Alignment / 7.7.3：
3D Alignment / 7.7.4：
Surface Texture Measurement of Worn Metal Parts / 7.8：
Form Measurement of Complex Tap Parameters / 7.8.2：
Phase Shifting Interferometry / Peter de Groot7.9：
Concept and Overview / 8.1：
Principles of Surface Measurement Interferometry / 8.2：
Phase Shifting Method / 8.3：
Phase Unwrapping / 8.4：
Phase Shifting Error Analysis / 8.5：
Interferometer Design / 8.6：
Focus / 8.7：
Light Sources / 8.9：
Examples of PSI Measurement / 8.10：
Coherence Scanning Interferometry / 9：
Terminology / 9.1：
Typical Configurations of CSI / 9.3：
Signal Formation / 9.4：
Signal Processing / 9.5：
Foundation Metrics and Height Calibration for CSI / 9.6：
Dissimilar Materials / 9.7：
Vibrational Sensitivity / 9.8：
Transparent Films / 9.9：
Examples / 9.10：
Digital Holographic Microscopy / Tristan Colomb ; Jonas Kühn9.11：
Acquisition / 10.1：
Reconstruction / 10.2.2：
Digital Camera / 10.3：
Optical Path Retarder / 10.3.3：
Digital Focusing / 10.4：
DHM Parameters / 10.4.2：
Automatic Working Distance in Reflection DHM / 10.4.3：
Sample Preparation and Immersion Liquids / 10.4.4：
Limitations of DHM / 10.5：
Parasitic Interferences and Statistical Noise / 10.5.1：
Height Measurement Range / 10.5.2：
Sample Limitation / 10.5.3：
Extensions of the Basic DHM Principles / 10.6：
Multi-wavelength DHM / 10.6.1：
Extended Measurement Range / 10.6.1.1：
Mapping / 10.6.1.2：
Stroboscopic Measurement / 10.6.2：
DHM Reflectometry / 10.6.3：
Infinite Focus / 10.6.4：
Applications of DHM / 10.6.5：
Topography and Defect Detection / 10.6.5.1：
Roughness / 10.6.5.2：
Micro-optics Characterization / 10.6.5.3：
MEMS and MOEMS / 10.6.5.4：
Semi-transparent Micro-structures / 10.6.5.5：
Conclusions / 10.7：
Imaging Confocal Microscopy / Roger Artigas11：
Introduction to Imaging Confocal Microscopes / 11.1：
Working Principle of an Imaging Confocal Microscope / 11.1.2：
Metrological Algorithm / 11.1.3：
Image Formation of a Confocal Microscope / 11.1.4：
General Description of a Scanning Microscope / 11.1.4.1：
Point Spread Function for the Limiting Case of an Infinitesimally Small Pinhole / 11.1.4.2：
Pinhole Size Effect / 11.1.4.3：
Types of Confocal Microscopes / 11.2：
Laser Scanning Confocal Microscope Configuration / 11.2.1.1：
Disc Scanning Confocal Microscope Configuration / 11.2.1.2：
Programmable Array Scanning Confocal Microscope Configuration / 11.2.1.3：
Objectives for Confocal Microscopy / 11.2.2：
Vertical Scanning / 11.2.3：
Motorised Stages with Optical Linear Encoders / 11.2.3.1：
Piezoelectric Stages / 11.2.3.2：
Comparison between Motorised and Piezoelectric Scanning Stages / 11.2.3.3：
Location of an Imaging Confocal Microscope / 11.3：
Setting Up the Sample / 11.3.2：
Setting the Right Scanning Parameters / 11.3.3：
Simultaneous Detection of Confocal and Bright Field Images / 11.3.4：
Sampling / 11.3.5：
Low Magnification against Stitching / 11.3.6：
Limitations of Imaging Confocal Microscopy / 11.4：
Maximum Detectable Slope on Smooth Surfaces / 11.4.1：
Noise and Resolution in Imaging Confocal Microscopes / 11.4.2：
Errors in Imaging Confocal Microscopes / 11.4.3：
Objective Flatness Error / 11.4.3.1：
Calibration of the Flatness Error / 11.4.3.2：
Measurements on Thin Transparent Materials / 11.4.3.3：
Measurement of Thin and Thick Film with Imaging Confocal Microscopy / 11.4.4：
Thick Films / 11.5.1：
Thin Films / 11.5.3：
Case Study: Roughness Prediction on Steel Plates / 11.6：
Light Scattering Methods / Theodore V. Vorburger ; Richard Silver ; Rainer Brodmann ; Boris Brodmann ; Jörg Seewig12：
Instrumentation and Case Studies / 12.1：
Early Developments / 12.3.1：
Recent Developments in Instrumentation for Mechanical Engineering Manufacture / 12.3.2：
Recent Developments in Instrumentation for Semiconductor Manufacture (Optical Critical Dimension) / 12.3.3：
SEMI MF 1048-1109 (2009) Test Method for Measuring the Effective Surface Roughness of Optical Components by Total Integrated Scattering / 12.4：
SEMI ME1392-1109 (2009) Guide for Angle-Resolved Optical Scatter Measurements on Specular or Diffuse Surfaces / 12.4.2：
ISO10110-8: 2010 Optics and Photonics - Preparation of Drawings for Optical Elements and Systems - Part 8: Surface Texture / 12.4.3：
Standards for Gloss Measurement / 12.4.4：
VDA Guideline 2009, Geometrische Produktspezifikation Oberflächenbeschaffenheit Winkelaufgelöste Streulichtmesstech-nik Definition, KenngröBen und Anwendung (Light Scattering Measurement Technique) / 12.4.5：
Index / 12.5：
Introduction to Surface Texture Measurement / Richard Leach1：
Surface Texture Measurement / 1.1：
Surface Profile and Areal Measurement / 1.2：
9.

図書
図書
9. Optical measurements : techniques and applications. 2nd corrected ed
Franz Mayinger, Oliver Feldmann (Eds)
出版情報: Berlin ; Tokyo : Springer-Verlag, c2001  xvii, 403 p. ; 25 cm
シリーズ名: Heat and mass transfer
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10.

図書
図書
10. Handbook of optical metrology : principles and applications (: hbk.)
edited by Toru Yoshizawa
出版情報: Boca Raton, Fla : CRC, c2009  xiii, 730 p. ; 26 cm
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