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1.

図書
図書
1. Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.
editors, Richard B. Fair, Charles W. Pearce, Jack Washburn
出版情報: Pittsburgh, Pa. : Materials Research Society, c1985  xiii, 284 p. ; 24 cm
シリーズ名: Materials Research Society symposium proceedings ; v. 36
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2.

図書
図書
2. Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.
editors, Tomas Diaz de la Rubia ... [et al.]
出版情報: Pittsburg, Pa. : Materials Research Society, c1997  xv, 541 p. ; 24 cm
シリーズ名: Materials Research Society symposium proceedings ; v. 469
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3.

図書
図書
3. RTP 2003, 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors : September 23-26, 2003, the Westin Francis Marion Hotel, Charleston, SC
editors, J. Gelpey ... [et al.] ; [sponsored by] IEEE EDS
出版情報: Piscataway, N.J. : IEEE, c2003  xi, 220 p. ; 28 cm
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