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1.

図書
図書
1. Physical sputtering of single-element solids (: Ger ; : U.S)
edited by R. Behrisch, with contributions by H.H. Andersen ... [et al.]
出版情報: Berlin ; New York : Springer-Verlag, 1981  x, 281 p. ; 24 cm
シリーズ名: Topics in applied physics ; v. 47 . Sputtering by particle bombardment / edited by R. Behrisch ; 1
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2.

図書
図書
2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography (: Ger ; : U.S)
edited by R. Behrisch ; with contributions by R. Behrisch ... [et al.]
出版情報: Berlin ; Tokyo : Springer-Verlag, 1983  xii, 391 p. ; 24 cm
シリーズ名: Topics in applied physics ; v. 52 . Sputtering by particle bombardment / edited by R. Behrisch ; 2
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3.

図書
図書
3. Characteristics of sputtered particles, technical applications (: gw ; : us)
edited by R. Behrisch and K. Wittmaack ; with contributions by R. Behrisch ... [et al.]
出版情報: Berlin ; Tokyo : Springer-Verlag, c1991  xiii, 410 p. ; 24 cm
シリーズ名: Topics in applied physics ; v. 64 . Sputtering by particle bombardment / edited by R. Bhrisch and K. Wittmaack ; 3
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