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1.

図書

図書
editors, R.L. Opila ... [et al.]
出版情報: Pennington, N.J. : Electrochemical Society, c2001-2003  3 v. ; 24 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 2000-26, 2002-1, 2003-21
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2.

図書

図書
editors, P.J. Hesketh ... [et al.]
出版情報: Pennington, N.J. : Electrochemical Society, c2000  viii, 258 p. ; 24 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 2000-19
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目次情報: 続きを見る
Preface
Micromachining
The Microfactory System using Electrochemical Machining / Masayuki Suda ; Kazuyoshi Furuta ; Toshihiko Sakuhara ; Tatsuaki Ataka
Electroplated Nanocrystalline Nickel-Iron Alloys as a New Powerful Material for Microstructured Molding Tools / A. Fath ; W. Leskopf ; K. Bade ; W. Bacher
Lateral Etch Study of Thin Films Using Hydrofluroric Acid Chemistries for MEMS Devices / G. Matamis ; Chuan-Che Wang ; B. Gogoi
Low Surface Tension Etching Solutions for Silicon Dioxide Removal in Microelectromechanical Systems / M. J. Parent ; L. Zazzera ; P. Rajtar ; F. E. Behr
Hybrid Micromachining and Surface Microstructuring of Alumina Ceramic / P. Mardilovich ; D. Routkevitch ; A. Govyadinov
Microfluidics
Micro Scale Purification Systems for Biological Sample Preparation / A. B. Frazier
Challenges and Solutions for Packaging MEMS and Microsystems / J. Neysmith ; D. F. Baldwin
Fabrication and Characterization of Plastic Microfluidic Devices Modified with Polyelectrolyte Multilayers / L. E. Loscascio ; S. L. R. Barker ; D. Ross ; Jay Xu ; S. Roberson ; M. Tarlov ; M. Gaitan
Bulk-Etched Integrated Mesoscopic Fluidic Interconnects for Fluidic Microdevices / J. A. Scalf ; D. Liepmann ; A. P. Pisano
Electro-Magnetically Actuated Diverting Valve Using LTCC Tapes / J. R. Gillman ; P. Espinoza-Vallejos ; L. Sola-Laguna ; J. J. Santiago-Aviles
Design of a MEMS Magnetic Bi-Stable Valve / D. Creyts IV ; P. J. Hesketh ; G. C. Frye-Mason
Room Temperature, Adhesive Bonding for Wafer Scale Packaging of Fluidic Microsystems / X. Ma ; B. Gierhart ; S. D. Collins ; R. L. Smith
Physical Sensors
Inertial Sensors: The Drive for Aspect Ratio / P. L. Bergstrom
Residual Stress Effect and Improvement Method on the Performance of Diaphragm-Based Piezoelectric Microphones / Mengnian Niu ; Sok Kim
A Post-Processing Method for Suppressing the Residual Mechanical Stress in CMOS Layers, for MEMS Applications / B. Ghodsian ; V. Milanovic
Chemical Sensors
Chemical Microsensors for Aerospace Applications / G. W. Hunter ; P. G. Neudeck ; G. Fralick ; C. C. Liu ; Q. H. Wu ; M. S. Sawayda ; Z. Jin ; J. Hammond ; D. Makel ; W. A. Rauch ; M. Liu ; G. Hall
A MEMS Based Hybrid Preconcentrator/Chemiresistor Chemical Sensor / R. C. Hughes ; S. V. Patel ; R. P. Manginell
Micro-Hotplate, an Useful Concept for Gas Sensing, Fluidics and Space Applications / D. Briand ; O. Guenat ; B. van der Schoot ; T. Hirata ; N. F. de Rooij
Detection of Trace Silver and Copper at an Array of Boron-Doped Diamond Microdisk Electrodes / C. Madore ; A. Duret ; W. Haenni ; A. Perret
FET Based pH and Nitrate Checkers for Acid-Rain Monitoring / S. Wakida ; M. Yamane ; S. Takeda ; Z. Siroma ; Y. Tsujimura ; J. Liu
Biosensors
Microfabricated PMMA Structure for DNA Preconcentration and Electrophoresis / Yu-Cheng Lin ; Chien-Kai Tseng ; Shao-Qin Hou
Soluble Sensors of Telephonic Signals / M. Garnett ; J. L. Remo
Selective Deposition of Octasubstituted Phthalocyanine Materials Based on Hydrophobic / Hydrophilic Surface Interactions / R. A. P. Zangmeister ; N. R. Armstrong
Nanomechanical Detection of Biomolecular Interactions / K. M. Hansen ; Guanghua Wu ; Hai-Feng Ji ; T. Thundat ; R. Datar ; R. Cote ; A. Majumdar
Ultra-Sensative Resonant Frequency Based Mass Detector / B. Ilic ; D. Czaplewski ; H. G. Craighead ; P. Neuzi ; C. Campagnolo ; C. Batt
Microfabrication Processes
Developing a [mu]-Fabrication Course: A Study in Multidisciplinary MEMS Curriculum Development / R. S. Evans
Microstructures for Monitoring Wafer Uniformity of Reactive Ion Etching / R. Leung ; D. W. Howard
Water Dispersible Silanes for Wettability Modification of Polysilicon / A. M. Almanza-Workman ; S. Raghavan ; P. Deymier ; D. J. Monk ; R. Roop
Correlation of Metal Film Grain Size to Optical Measurement Results / T. Robinson ; C. Narayan ; J. Sledziewski ; G. Ready ; S. Alie
Preface
Micromachining
The Microfactory System using Electrochemical Machining / Masayuki Suda ; Kazuyoshi Furuta ; Toshihiko Sakuhara ; Tatsuaki Ataka
3.

図書

図書
editors, R. Singh ... [et al.] ; [sponsord by] Dielectric Science and Technology and Electronics Divisions
出版情報: Pennington, N.J. : Electrochemical Society, c2000  viii, 226 p. ; 24 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 99-7
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4.

図書

図書
editors, K.B. Sundaram ... [et al.]
出版情報: Pennington, N.J. : Electrochemical Society, c2001  x, 286 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 2001-7
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目次情報: 続きを見る
Preface
Organizers
Oxide Wear-Out, Reliability, Stress and Interfaces / I:
A Review of Oxide Wearout, Breakdown, and Reliability / D. Dumin
Surface And Interface Study Of Ion Beam Deposited Silicon oxide Thin films / Heinz D. Wazenboeck ; Emmerich Bertagnolli ; Bernhard Basnar ; Juergen Smoliner ; Martin Gritsch ; Herbert Hutter ; Josef Brenner ; C. Tomastik ; Herbert Storri
Study of Inversion Layer Hole Mobility In p-Mosfet During High-field Stressing / R. Jarawal ; D. Misra
Two Limiting Thinnesses Of The Ultrathin Gate Oxide / Samares Kar
SiO[subscript 2] Stress and Interfaces / II:
The Connection Between oxide leakage currents and Si/SiO[subscript 2] Interface Trap Generation / P. M. Lenahan
Charging Damage During Plasma Enhanced Dielectric Deposition / K. Cheung
Kinetics and Mechanisms of Organic Contaminant Interactions at Silicon Surfaces in High Temperature Processes / N. Rana ; P. Raghu ; F. Shadman
SiO[subscript 2] Films and Properties / III:
Remote Plasma Deposited Gate Dielectrics on Si and SiGe Mosfets / T. Ngai ; R. Sharma ; J. Fretwell ; X. Chen ; J. Chen ; W. Brookover ; S. Banerjee
Rapid Thermal Processes of High Permittivity Films on Silicon for ULSI Gate Dielectrics Applications / S. P. Tay ; R. Sharangpani ; Y. Z. Hu
Processing of Thick Thermal Gate Oxides in Trenchs / C. T. Wu ; R. Ridley ; G. Dolny ; T. Grebs ; J. Hao ; S. Suliman ; B. Venkataraman ; O. Awadelkarim ; R. Williams ; P. Roman ; J. Ruzyllo
Electrical Properties of SiO[subscript 2]-Films Prepared by VUV Chemical Vapor Deposition / Y. Motoyama ; J. Miyano ; K. Tosikawa ; Y. Yagi ; K. Kurosawa ; A. Yokotani ; W. Sasaki
SiO[subscript 2] Film Deposition on Different Substrate Materials by Photo- CVD Using Vacuum Ultraviolet Radiation / K. Toshikawa
Silicon Nitrides/ Oxynitrides / IV:
Low Energy Ion Irradiation of Silicon: Compound Formation and Segregation of Impurities / M. Petravic ; J. S. Williams ; P. N. K. Deenapanray
Characteristics of Silicon Oxynitrides Made By ECR Plasmas / J. A. Diniz ; P. J. Tatsch ; J. Swart
Radiation Hardening of Oxynitrides Formed By Low Nitrogen Implantation into Silicon Prior to Oxidation / J. Godoy Fo
Silicon Nitrides/ Oxynitrides II / V:
Material and Process Considerations of Ultra thin Silicon (Oxy) Nitride Films Grown on Silicon and SiO[subscript 2] Surfaces / C. P. D'Emic ; E. P. Gusev ; K. K. Chan ; T. Zabel ; M. Copel ; R. Murphy ; P. Kozolowski ; J. Newbury
Silicon OxyNitride: A Versatile Material for Integrated Optics Application / K. Worhoff ; A. Driessen ; P. V. Lambeck
Characterization of Silicon Oxynitride Thin Films Deposited By ECR-PECVD / C. Simionescu ; J. Wojcik ; H. K. Haugen ; J. A. Davies ; P. Mascher
Silicon Nitrides/ Oxynitrides III / VI:
Characterization of Low- Temperature Magnetoplasma- Grown Si Oxynitride and Si Oxide / H. Ikoma
Advances in Single Wafer Chemical Deposition of Oxide and Nitride films / W. Palmer ; Z. Gabric
High Integrity Direct Oxidation/Nitridation at Low Temperatures Using Radicals / T. Ohmi ; S. Sugawa ; M. Hirayama
Silicon Nitride
Thermally Induced Stress Changes in High Density Plasma Deposited Silicon Nitride Films / R. E. Shah ; H. Baumann ; D. Serries ; M. Mikulla ; R. Keiffer
Effect of Oxygen in Deposited Ultra Thin Silicon Nitride Film on Electrical Properties / K. Muraoka ; K. Kurihara
Influence of Low- energy argon Ion Bombardment and Vacuum Annealing on the Silicon Nitride Surface Properties / I. P. Petrenko ; V. A. Gritsenko ; L. M. Logvinsky ; H. Wong
Authors Index
Subject Index
Preface
Organizers
Oxide Wear-Out, Reliability, Stress and Interfaces / I:
5.

図書

図書
editors, M. Meyyappan, D.J. Economou, S.W. Butler ; [sponsored by] Dielectric Science and Technology and Electronics Divisions
出版情報: Pennington, NJ : Electrochemical Society, c1997  ix, 347 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 97-9
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6.

図書

図書
editors, Hazara S. Rathore ... [et al.]
出版情報: Pennington, NJ : Electrochemical Society, c1997  viii, 262 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 97-8
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7.

図書

図書
editors M. Jamal Deen ... [et al.] ; Dielectric Science and Technology and Electronics Divisions [of the Electrochemical Society]
出版情報: Pennington, New Jersey : Electrochemical Society, c1997  xiii, 588 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 97-10
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8.

図書

図書
editors, M. Cahay ... [et al.]
出版情報: Pennington, NJ : Electrochemical Society, c1997  x, 494 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 97-11
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9.

図書

図書
editors, Mark D. Allendorf, Claude Bernard
出版情報: Pennington, NJ : Electrochemical Society, c1997  xxii, 1652 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 97-25
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10.

図書

図書
editors, G.S. Mathad, M. Meyyappan, M. Engelhardt ; Dielectric Science & Technology, Electronics, and Electrodeposition Divisions
出版情報: Pennington, NJ : Electrochemical Society, c1998  ix, 370 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 97-30
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11.

図書

図書
editor, Hazara S. Rathore ... [et al.]
出版情報: Pennington, NJ : Electrochemical Society, c1998  viii, 276 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 97-31
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12.

図書

図書
edited by Sheng S. Li, H. C. Liu, M.Z. Tidrow
出版情報: Pennington, NJ : Electrochemical Society, c1997  vii, 280 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 97-33
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13.

図書

図書
editors, C.R. Abernathy ... [et al.] ; Dielectric Science & Technology, Electronics, and High Temperature Material[s] Divisions of the Electrochemical Society [and] European III-V Nitride Community
出版情報: Pennington, NJ : Electrochemical Society, c1998  viii, 294 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 97-34
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14.

図書

図書
editors W.D. Brown ... [et al.] ; Dielectric Science and Technology, and Electronics Divisions [of the Electrochemical Society]
出版情報: Pennington, NJ : Electrochemical Society, c1998  x, 366 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 98-3
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15.

図書

図書
editor, G.S. Mathad ; [sponsored by] Dielectric Science & Technology and electronics Divisions
出版情報: Pennington, NJ : the Electrochemical Society, Inc., c1998  viii, 292 p. ; 24 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 98-4
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16.

図書

図書
editors, S. Raghavan, R.L. Opila, L. Zhang ; Electronics and Dielectric Science and Technology Divisions [of the Electrochemical Society]
出版情報: Pennington, N. J. : Electrochemical Society, c1998  viii, 274 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 98-7
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17.

図書

図書
editors, P. C. Andricacos ...[et al.]
出版情報: Pennington, N.J. : Electrochemical Society, c1999  viii, 274 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 98-6
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18.

図書

図書
editors, Peter J. Hesketh, Henry Hughes, Wayne E. Bailey
出版情報: Pennington, NJ : Electrochemical Society, c1998  viii, 270 p. ; 24 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 98-14
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19.

図書

図書
editors, T. D. Moustakas, S. E. Mohney, S. J. Pearton ; [sponsored by] Dielectric Science and Technology, Electronics, and High Temperature Materials Divisions
出版情報: Pennington, NJ : Electrochemical Society, c1999  vii, 230 p. ; 24 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 98-18
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20.

図書

図書
editors, M. Cahay ... [et al.]
出版情報: Pennington, NJ : Electrochemical Society, c1999  xi, 690 p. ; 24 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 98-19
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21.

図書

図書
edited by S. S. Li ... [et al.]
出版情報: Pennington, NJ : Electrochemical Society, c1999  vii, 242 p. ; 24 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 98-21
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22.

図書

図書
editor, Yue Kuo
出版情報: Pennington, NJ : Electrochemical Society, c1999  xi, 428 p. ; 24 cm
シリーズ名: Proceedings / [Electrochemical Society] ; 98-22
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23.

図書

図書
editors, M. D. Allendorf ... [et al.]
出版情報: Pennington, NJ : Electrochemical Society, c1999  xi, 486 p. ; 24 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 98-23
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24.

図書

図書
editors, I. Ali, S. Raghavan
出版情報: Pennington, NJ : Electrochemical Society, c1997  ix, 275 p. ; 24 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 96-22
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25.

図書

図書
editors, Cor L. Claeys ... [et al.]
出版情報: Pennington, NJ : Electrochemical Society, c1997  ix, 402 p. ; 24 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 97-2
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26.

図書

図書
editors, P.J. Hesketh, G. Barna, H. G. Hughes
出版情報: Pennington, NJ : Electrochemical Society, c1997  vii, 217 p. ; 24 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 97-5
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27.

図書

図書
editors, J. L. Davidson ... [et al.]
出版情報: Pennington, N.J. : Electrochemical Society, c1998  xii, 696 p. ; 24 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 97-32
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28.

図書

図書
editors, M. Cahay ... [et al.] ; [sponsored by the Electrochemical Society] Dielectric Science and Technology, Electronics and Luminescence and Display Materilas Divisions
出版情報: Pennington, NJ : The Electrochemical Society, c1996  ix, 371 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 95-17
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29.

図書

図書
editors, D. J. Lockwood ... [et al.]
出版情報: Pennington, N.J. : Electrochemical Society, c1996  ix, 495 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 95-25
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30.

図書

図書
editors, T. M. Besmann ... [et al.]
出版情報: Pennington, NJ : Electrochemical Society, c1996  xxii, 892 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 96-5
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31.

図書

図書
edited by V. Swaminathan...[et al.]
出版情報: Pennington, NJ : Electrochemical Society, c1995  ix, 378 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 95-6
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32.

図書

図書
editors, T.D. Moustakas, J.P. Dismukes, S.J. Pearton
出版情報: Pennington, NJ : Electrochemical Society, c1996  vii, 234 p. ; 24 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 96-11
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33.

図書

図書
editors, G.S. Mathad, M. Meyyappan ; [sponsored by] Dielectric Science and Technology and electronics Divisions
出版情報: Pennington, NJ : the Electrochemical Society, Inc., c1996  xi, 720 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 96-12
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34.

図書

図書
editor, Yue Kuo
出版情報: Pennington, NJ : Electrochemical Society, c1997  xii, 404 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; 96-23
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35.

図書

図書
editors, H. U. Anderson, A. C. Khandkar, M. Liu
出版情報: Pennington, NJ : Electrochemical Society, c1997  viii, 336 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 95-24
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36.

図書

図書
edited by S. Srinivasan ... [et al.] ; [sponsored by] the Electrochemical Society. Energy Technology, Battery, Physical Electrochemistry, and High Temperature Materials Divisions
出版情報: Pennington, NJ : The Electrochemical Society, c1994  ix, 509 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 94-23
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37.

図書

図書
edited by F. Ren ... [et al.]
出版情報: Pennington, NJ : Electrochemical Society, c1995  xi, 510 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 95-21
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38.

図書

図書
edited by S. S. Li ... [et al.]
出版情報: Pennington, NJ : The Electrochemical Society, c1995  viii, 264 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 95-28
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39.

図書

図書
editors, D. Denton, P.J. Hesketh, H. Hughes
出版情報: Pennington, NJ : Electrochemical Society, c1995  ix, 362 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 95-27
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40.

図書

図書
edited by Hazara S. Rathore
出版情報: Pennington, NJ : Electrochemical Society, c1995  viii, 245 p. ; 23
シリーズ名: Proceedings / [Electrochemical Society] ; v. 95-3
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41.

図書

図書
editors, Cor L. Claeys ... [et al.]
出版情報: Pennington, NJ : Electrochemical Society, c1995  xi, 446 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 95-9
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42.

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図書
editors, K. V. Ravi, J. P. Dismukes ; co-organizers, K.E. Spear ... [et al.]
出版情報: Pennington, N.J. : Electrochemical Society, c1995  xx, 731 p. ; 24 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 95-4
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43.

図書

図書
edited by Kurt R. Hebert, George E. Thompson
出版情報: Pennington, NJ : Electrochemical Society, c1994  ix, 312 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 94-25
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44.

図書

図書
editors [sic], Yue Kuo
出版情報: Pennington, NJ : Electrochemical Society, c1995  x, 410 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; 94-35
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45.

図書

図書
edited by R.B. Comizzoli, R.P. Frankenthal, and J.D. Sinclair ; assistant editors, K.J. Hanson, R.L. Opila, K.M. Takahashi
出版情報: Pennington, NJ : Electrochemical Society, c1994  ix, 417 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 94-29
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46.

図書

図書
edited by Hazara S. Rathore, G.S. Mathad, Du B. Nguyen ; Dielectric Science & Technology and Electronics Divisions
出版情報: Pennington, NJ : Dielectric Science & Technology, and Electronics Divisions, Electrochemical Society, c1992  viii, 330 p.
シリーズ名: Proceedings / [Electrochemical Society] ; v. 92-4
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47.

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図書
edited by Wayne Greene, George J. Hefferon, L.K. White . edited by Terry O. Herndon, Andrew L. Wu
出版情報: Pennington, NJ : Electrochemical Society, c1992  x, 382 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 92-6
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48.

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図書
edited by Vaughn E. Akins, Hiroyuki Harada ; Electronics and Dielectric Science and Technology Divisions
出版情報: Pennington, NJ : Electrochemical Society, c1992  ix, 283 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; 92-8
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49.

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図書
edited by Ulrich Gösele ... [et al. ; sponsored by the] Electronics and Dielectric Science and Technology Divisions
出版情報: Pennington, NJ : Electrochemical Society, c1992  ix, 498 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 92-7
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図書
edited by H.H. Lee ... [et al.] ; Electronics and Dielectric Science and Technology divisions
出版情報: Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, c1991  viii, 365 p. ; 23 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 91-1
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