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Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films / editors, V.J. Kapoor, W.D. Brown ; Dielectric Science and Technology and Electronics Divisions

資料種別:

図書

出版情報:

Pennington, NJ : Electrochemical Society, c1994

形態:

xiii, 625 p. ; 23 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 94-16 <BA01323290>

著者名:

ISBN:

9781566770484 [1566770483]

書誌ID:

BA23818650

子書誌情報

フルテキスト

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書誌詳細

注記:	Includes bibliographical references
主題:	Electric insulators and insulation--Thin films--Congresses; Silicon dioxide--Congresses; Silicon nitride--Congresses; Thin film devices--Congresses
言語:	英語

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