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1.

図書
図書
1. Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium
editors, M.T. Swihart, M.D. Allendorf, M. Meyyappan
出版情報: Pennington, N.J. : Electrochemical Society, c2001  ix, 508 p. ; 24 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 2001-13
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2.

図書
図書
2. Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium (: set. ; v. 1 ; v. 2)
editors, M.D. Allendorf, F. Maury, F. Teyssandier ; sponsoring divisions, High Temperature Materials, Electronics, Dielectric Science and Technology
出版情報: Pennington, NJ : Electrochemical Society, c2003  2 v. (xxviii, 1570 p.) ; 24 cm
シリーズ名: Proceedings / [Electrochemical Society] ; v. 2003-8
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