| 1.
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Eric G. Johnson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
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| 2.
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P.C. Chen, Tom D. Milster, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
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| 3.
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Michael R. Feldman, Yung-Cheng Lee, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, ARPA, Advanced Research Projects Agency
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| 4.
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Jan J. Dubowski, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
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| 5.
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Ray T. Chen, Peter S. Guilfoyle, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, DARPA--Defense Advanced Research Projects Agency
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| 6.
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Hidehiro Watanabe, editor ; sponsored by PMJ--Photomask Japan, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology, SPIE--the International Society for Optical Engineering
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| 7.
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Hidehiro Watanabe, editor ; sponsored by PMJ--Photomask Japan, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology, SPIE--the International Society for Optical Engineering
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| 8.
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8. Photomask and next-generation lithography mask technology VII : 12-13 April 2000, Yokohama, Japan
Hiroaki [i.e. Hiraoki] Morimoto, editor ; sponsored by Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for symposium, Japan Society of Applied Physics, Japan Society for Precision Engineering, [and] Institute of Electrical Engineers of Japan ; cooperating organization for technical exhibit, SEMI Japan
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| 9.
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Suning Tang, Yao Li, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
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| 10.
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Hiroichi Kawahira, editor ; sponsored by PMJ--Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for symposium, the Japan Society of Applied Physics ... [et al.] ; supported by Yokohama City
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