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1.

図書
図書
1. Optical/laser microlithography II, 1-3 March 1989, San Jose, California /Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Lin, Burn Jeng, 1942- ; Society of Photo-optical Instrumentation Engineers
出版情報: Bellingham, Wash., USA : SPIE, c1989  viii, 572 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1088
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2.

図書
図書
2. Optical/laser microlithography : 2-4 March 1988, Santa Clara, California
Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
出版情報: Bellingham, Wash., USA : SPIE, c1988  viii, 486 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 922
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