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1.

図書

図書
Rajeshuni Ramesham, chair/editor ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.]
出版情報: Bellingham, Wash. : SPIE, c2001  xxvii, 296 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4558
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2.

図書

図書
Carlos H. Mastrangelon Holger Becker, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
出版情報: Bellingham, Wash. : c2001, SPIE  xxv, 274 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4560
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3.

図書

図書
M. Edward Motamedi, Rolf Göring, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.]
出版情報: Bellingham, Wash. : SPIE, c2001  xxv, 350 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4561
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4.

図書

図書
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International
出版情報: Piscataway, NJ : IEEE Service Center, c2002  v, 430 p. ; 28 cm
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5.

図書

図書
Jean Michel Karam, John Yasaitis, chair/editor ; sponsored and published by SPIE--The International Society of Optical Engineering ; cooperationg organizations, Semiconductor Equipment and Materials International (USA) ... [et al.]
出版情報: Bellingham, Wash. : SPIE, c2001  x, 485 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4557
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6.

図書

図書
[sponsored by IEEE Electron Devices Society, IEEE Components Packaging and Manufacturing Technology Society, Semiconductor Equipment & Materials International (SEMI), and Society of Applied Physics of Japan]
出版情報: Piscataway, N.J. : IEEE Service Center, c2001  xi, 525 p. ; 28 cm
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7.

図書

図書
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International
出版情報: Piscataway, NJ : IEEE Service Center, c2001  vii, 244 p. ; 28 cm
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8.

図書

図書
Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations, Solid State Technology, Sandia National Laboratories
出版情報: Bellingham, Wash. : SPIE--The International Society of Optical Engineering, c1996  ix, 366 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2879
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9.

図書

図書
Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology
出版情報: Bellingham, Wash. : SPIE, c1997  ix, 310 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3223
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10.

図書

図書
James H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
出版情報: Bellingham, Wash. : SPIE, c1998  xi, 402 p. ; 28 cm
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3511
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