Proceedings of the Symposia on Patterning Science and Technology II . Interconnection and Contact Metallization for ULSI / edited by Wayne Greene, George J. Hefferon, L.K. White . edited by Terry O. Herndon, Andrew L. Wu
- 資料種別:
- 図書
- 出版情報:
- Pennington, NJ : Electrochemical Society, c1992
- 形態:
- x, 382 p. ; 23 cm
- シリーズ名:
- Proceedings / [Electrochemical Society] ; v. 92-6 <BA01323290>
- 著者名:
- ISBN:
- 9781566770071 [1566770076]
- 書誌ID:
- BA14411867
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