所蔵情報QRコード
Proceedings of the Tutorial Symposium on Semiconductor Technology / edited by Daryl Ann Doane, David B. Fraser, Dennis W. Hess ; Electronics and Dielectrics and Insulation Divisions
- 資料種別:
- 図書
- 出版情報:
- Pennington, NJ : Electrochemical Society, c1982
- 形態:
- vi, 258 p. ; 23 cm
- シリーズ名:
- Proceedings / [Electrochemical Society] ; v. 82-5 <BA01323290>
- 著者名:
- 書誌ID:
- BA80898119
類似資料:
Electrochemical Society |
the Electrochemical Society, Inc. |
Institute of Electrical and Electronics Engineers, c1991 |
The Electrochemical Society |
4
図書
Plasma etching processes for sub-quarter micron devices : proceedings of the international symposium
Electrochemical Society | |
Electrochemical Society |