Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies | 東京工業大学附属図書館蔵書検索

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Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies / edited by M. Gentili, C. Giovannella, and S. Selci

資料種別:

図書

出版情報:

Dordrecht ; Boston : Kluwer Academic Publishers, 1994

形態:

xii, 215 p. ; 25 cm

シリーズ名:

NATO ASI series ; ser. E . Applied sciences ; v. 264 <BA00020624>

著者名:

ISBN:

9780792327943 [0792327942]

書誌ID:

BA22470329

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注記:	"Proceedings of the NATO Advanced Research Workshop on Nanolithography: a Borderland between STM, EB, IB, and X-Ray Lithographies, Frascati, Roma, Italy, April 6-8, 1993"--T.p. verso "Published in cooperation with NATO Scientific Affairs Division." Includes index
主題:	Integrated circuits--Design and construction--Congresses; Microlithography--Congresses; Molecular electronics--Congresses; Nanotechnology--Congresses
言語:	英語

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