Proceedings of the symposia on reliability of semiconductor devices and interconnection and multilevel metallization, interconnection, and contact technologies | 東京工業大学附属図書館蔵書検索

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Proceedings of the symposia on reliability of semiconductor devices and interconnection and multilevel metallization, interconnection, and contact technologies / edited by Harzara S. Rathore, Geraldine C. Schwartz, Robin A. Susko ; [sponsored by] Dielectrics and Insulation and Electronics divisions

資料種別:

図書

出版情報:

Pennington, NJ : Electrochemical Society, c1989

形態:

viii, 495 p. ; 23 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 89-6 <BA01323290>

著者名:

書誌ID:

BA84982807

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書誌詳細

その他の標題:	Reliability of semiconductor devices and interconnection and multilevel metallization, interconnection, and contact technologies
注記:	Includes bibliographical references and indexes "... held during the Fall meeting of the Electrochemical Society, October 9 to 14, 1988"--on pref
主題:	Integrated circuits--Very large scale integration--Design and construction--Congresses; Metallizing--Congresses; Semiconductors--Reliability--Congresses
言語:	英語

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