Introduction / 1: |
Molecular Beams and Cluster Nucleation / 2: |
Molecular Beams / 2.1: |
Continuous Effusive Beams / 2.1.1: |
Continuous Supersonic Beams / 2.1.2: |
Pulsed Beams / 2.1.3: |
Nucleation and Aggregation Processes / 2.2: |
Classical Theory / 2.2.1: |
Homogeneous Nucleation by Monomer Addition / 2.2.2: |
Homogeneous Nucleation by Aggregation / 2.2.3: |
Nucleation of Clusters in Beams / 2.2.4: |
Semi-empirical Approach to Clustering in Free Jets / 2.2.5: |
Cluster Sources / 3: |
Vaporization Methods / 3.1: |
Joule Heating / 3.1.1: |
Plasma Generation for Cluster Production / 3.1.2: |
Laser Vaporization / 3.1.3: |
Glow and Arc Discharges / 3.1.4: |
Continuous Sources / 3.2: |
Effusive Joule-Heated Gas Aggregation Sources / 3.2.1: |
Magnetron Plasma Sources / 3.2.2: |
Supersonic Sources / 3.2.3: |
Pulsed Sources / 3.3: |
Pulsed Valves / 3.3.1: |
Laser Vaporization Sources / 3.3.2: |
Arc Pulsed Sources / 3.3.3: |
Characterization and Manipulation of Cluster Beams / 4: |
Mass Spectrometry / 4.1: |
Quadrupole Mass Spectrometry / 4.1.1: |
Time-of-Flight Mass Spectrometry / 4.1.2: |
Retarding Potential Mass Spectrometry / 4.1.3: |
Detection Methods / 4.2: |
Ionization of Clusters / 4.2.1: |
Charged Cluster Detection / 4.2.2: |
Cluster Beam Characterization / 4.2.3: |
Cluster Selection and Manipulation / 4.3: |
Size and Energy Selection / 4.3.1: |
Quadrupole Filter / 4.3.2: |
Separation of Gas Mixtures in Supersonic Beams / 4.3.3: |
Thin Film Deposition and Surface Modification by Cluster Beams / 5: |
Kinetic Energy Regimes / 5.1: |
Diffusion and Coalescence of Clusters on Surfaces / 5.2: |
Low-Energy Deposition / 5.3: |
Cluster Networks and Porous Films / 5.3.1: |
Composite Nanocrystalline Materials / 5.3.2: |
High-Energy Deposition / 5.4: |
Implantation, Sputtering, Etching / 5.4.1: |
Thin Film Formation / 5.4.2: |
Outlook and Perspectives / 6: |
Cluster Beam Processing of Surfaces / 6.1: |
Nanostructured Materials Synthesis / 6.2: |
Perspectives / 6.3: |
Appendix |
References |
Introduction / 1: |
Molecular Beams and Cluster Nucleation / 2: |
Molecular Beams / 2.1: |