- Society of Photo-optical Instrumentation Engineers (9)
- Design and Process Integration for Microelectronic Manufacturing (Conference) (4)
- International SEMATECH (3)
- Singh, Vivek K. (3)
- Liebmann, Lars W. (2)
- SEMATECH (2)
- Starikov, Alexander, 1952- (2)
- Tobin, Kenneth W. (2)
- Wong, Alfred Kwok-Kit (2)
- Cost and Performance in Integrated Circuit Creation (Conference) (1)
- Design for Manufacturability Through Design-Process Integration (1)
- Design, Process Integration, and Characterization for Microelectronics (Conference) (1)
- Emami, Iraj (1)
- Monahan, Kevin M. (1)
- Rieger, Michael L. (1)
- Semiconductor Equipment and Materials International (1)
- Wong, Alfred K.K. (1)