Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology

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Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology / editors, H.R. Huff, L. Fabry, S. Kishino ; sponsoring division, Electronics

Format:

Book

Published:

Pennington, NJ : The Electrochemical Society, c2002

Description:

2 v. (xx, 1074 p.) ; 24 cm

Series:

Proceedings / [Electrochemical Society] ; v. 2002-2 <BA01323290>

Authors:

ISBN:

9781566773744 [1566773741] (: set)
9781566773683 [1566773687] (v. 1)
9781566773737 [1566773733] (v. 2)

NCID:

BA60982595

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Bibliography Details

Note:	"... the Ninth International Symposium on Silicon Materials Science and Technology, held May 13-17, 2002 in Philadelphia during the centennial anniversary of The Electrochemical Society, Inc" --on pref. Includes bibliographical references and index
Language:	English

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