Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France / Bernard Courtois ... [et. al.], chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering, CNRS-INPG-UJF (France)
- 資料種別:
- 図書
- 出版情報:
- Bellingham, Wash., USA : SPIE, c1999
- 形態:
- 2 v. ; 28 cm
- シリーズ名:
- Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3680 <BA0022700X>
- 著者名:
- ISBN:
- 9780819431547 [0819431540] (pt. 1)
9780819431547 [0819431540] (pt. 2) - 書誌ID:
- BA80138498
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