Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California | 東京工業大学附属図書館蔵書検索

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Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California / Marylyn H. Bennett, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE, c1995

形態:

xi, 514 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2439 <BA0022700X>

著者名:

ISBN:

9780819417879 [0819417874] (pbk.)

書誌ID:

BC06573289

子書誌情報

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書誌詳細

その他の標題:	Integrated circuit metrology, inspection, and process control 9
注記:	Includes bibliographical references and author index
主題:	Integrated circuits--Inspection--Congresses; Integrated circuits--Measurement--Congresses; Optical measurements--Congresses; Process control--Congresses; Scanning electron microscopes--Congresses
言語:	英語

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