Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 24 October, 1995, Austin, Texas | 東京工業大学附属図書館蔵書検索

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Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 24 October, 1995, Austin, Texas / Wayne Bailey, M. Edward Motamedi, Fang-Chen Luo, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c1995

形態:

v, 154 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2641 <BA0022700X>

著者名:

Bailey, Wayne E. <DA06929265>

Motamedi, M. Edward <DA10987265>

Semiconductor Equipment and Materials International <DA0468648X>

United States. National Institute of Standards and Technology <DA02985311>

Society of Photo-optical Instrumentation Engineers <DA00848546>

さらに 1 件

ISBN:

9780819420077 [0819420077]

書誌ID:

BC06604906

子書誌情報

フルテキスト

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所蔵情報

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書誌詳細

注記:	Includes bibliographic references and index
主題:	Microelectromechanical systems--Congresses; Microelectronics--Congresses; Optoelectronics--Congresses
言語:	英語

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