Process, equipment, and materials control in integrated circuit manufacturing II : 16-17 October 1996, Austin, Texas | 東京工業大学附属図書館蔵書検索

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Process, equipment, and materials control in integrated circuit manufacturing II : 16-17 October 1996, Austin, Texas / Armando Iturralde, Te-Hua Lin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE, c1996

形態:

vii, 258 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2876 <BA0022700X>

著者名:

ISBN:

9780819422743 [0819422746]

書誌ID:

BC06860010

子書誌情報

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書誌詳細

その他の標題:	Process, equipment, and materials control in integrated circuit manufacturing 2
注記:	Includes bibliographic references and author index
主題:	Dielectric films--Congresses; Integrated circuits--Design and construction--Congresses; Metallizing--Congresses; Plasma etching--Congresses
言語:	英語

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