Microelectronic structures and MEMS for optical processing IV : 21-22 September, 1998, Santa Clara, California | 東京工業大学附属図書館蔵書検索

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Microelectronic structures and MEMS for optical processing IV : 21-22 September, 1998, Santa Clara, California / M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

資料種別:

図書

出版情報:

Bellingham, Washington : SPIE, c1998

形態:

vii, 240 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3513 <BA0022700X>

著者名:

ISBN:

9780819429728 [0819429724]

書誌ID:

BC07260212

子書誌情報

フルテキスト

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所蔵情報

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他の版・巻

書誌詳細

その他の標題:	Microelectronic structures and MEMS for optical processing 4
注記:	Includes bibliographical references and index
主題:	Microelectromechanical systems--Congresses; Microelectronics--Congresses; Optoelectronics--Congresses
言語:	英語

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