MEMS components and applications for industry, automobiles, aerospace, and communication II : 28-29 January 2003, San Jose, California, USA | 東京工業大学附属図書館蔵書検索

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MEMS components and applications for industry, automobiles, aerospace, and communication II : 28-29 January 2003, San Jose, California, USA / Siegfried W. Janson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE, c2003

形態:

xliv, 248 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4981 <BA0022700X>

著者名:

ISBN:

9780819447814 [0819447811]

書誌ID:

BC16158975

子書誌情報

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書誌詳細

その他の標題:	MEMS components and applications for industry, automobiles, aerospace, and communication 2
注記:	Includes bibliographical references and index
主題:	Manufacturing processes--Congresses; Microelectromechanical systems--Design and construction--Congresses; Microelectromechanical systems--Industrial applications--Congresses
言語:	英語

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