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MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA / James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA)

資料種別:
図書
出版情報:
Bellingham, Wash., USA : SPIE, c2003
形態:
xlvi, 368 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4983 <BA0022700X>
著者名:
Smith, James H.
Krulevitch, Peter A.
Lakner, Hubert K.
Society of Photo-optical Instrumentation Engineers <DA00848546>
Semiconductor Equipment and Materials International <DA0468648X>
Solid State Technology (Organization)
Sandia National Laboratories <DA1390243X>
さらに 2 件
ISBN:
9780819447838 [0819447838]
書誌ID:
BC08845404
子書誌情報
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