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MOEMS display and imaging systems : 28-29 January 2003, San Jose, California, USA / Hakan Urey, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

資料種別:
図書
出版情報:
Bellingham, Wash., USA : SPIE, c2003
形態:
xlii, 306 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4985 <BA0022700X>
著者名:
ISBN:
9780819447852 [0819447854]
書誌ID:
BC08845302
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